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Product name: Graphite heater for vacuum electric furnace Purpose of this product: It is electrical components using in sintering microwave oven in vacuum furnace Main purpose for this series: It is mainly used for sintering diamond segment in diamond tools making industry Specialty of raw materials for this series: High temperature resistance, good oxidation resistance, high mechanical strength. Properties depends on different products Main products of this series: Graphite component molds, clay mold, graphite caliber ring for petroleum drill bit and graphite nozzle rod Note: For machined graphite products: For non-ferrous metallurgy and processing For sintering mold of diamond tools For electron and semiconductor industry For application of processing by industrial furnace under high temperature For mechanical industry.

We can offer a range of solutions for in vacuum heating, baking and vacuum wafer annealing, using different types of vacuum heaters and in vacuum heating elements. The pictures above show various types of resistance heating elements, both tubular and flat wafer heaters. We can also offer in vacuum halogen heaters. The pictures below show our plain high density graphite and carbon carbon composite (CCC) heating elements for low vacuum applications and for high vacuum, ultra high vacuum (UHV) or corrosive environments our silicon carbide, pyrolytic boron nitride (PBN) or pyrolytic graphite (PG) coated high density graphite and carbon carbon composite elements, in addition we supply our ultra low mass solid state pyrolytic boron nitride / pyrolytic graphite ( PG/PBN) composite ceramic elements.

The invention relates to a resistive heater comprising an encapsulated solid graphite body, wherein the encapsulant forms a substantially continuous surface coating the graphite body and wherein the encapsulant is selected from a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof. In one embodiment, the encapsulant is a thin shell of a chemical vapor deposited (CVD) material such as pyrolytic boron nitride (pBN) or aluminum nitride (AlN).

The invention further relates to a method for forming a graphite heater from a solid body composed of graphite, the method comprises the steps of: a) coating a graphite body with a overcoat layer of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof; b) forming an electrical circuit pattern formed in the graphite body with opposed ends adapted for connection to an external power supply; and c) encapsulating the patterned graphite body with at least an outer coat layer of nitride, a carbonitride or an oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, forming an electrically insulating thin film shell surrounding the heater assembly.